• Meet the double standards for stability and high performance of semiconductor equipment

• Ensure safe, continuous and stable operation of motor control center of precision equipment

With the help of the times and policies, a good atmosphere has been created for the development of high-end manufacturing industries with high technology content, high added value and strong competitiveness, and the new normal from "manufacturing" to "intelligent manufacturing" has been promoted. As the representative of high-end equipment manufacturing industry and the cornerstone of chip manufacturing, semiconductor equipment has ushered in a period of strategic opportunities with the support of 5g, the Internet of things, artificial intelligence and other high technologies, and is upgrading and transforming to intelligent, digital and green.

China micro semiconductor equipment (Shanghai) Co., Ltd. (hereinafter referred to as "China micro") is committed to providing global integrated circuit and LED chip manufacturers with leading processing equipment and process technology solutions. The capacitively coupled plasma (CCP) etching equipment, inductively coupled plasma (ICP) etching equipment, deep silicon etching equipment and MOCVD equipment developed by China micro semiconductor equipment (Shanghai) Co., Ltd. have reached the top three in the world in terms of performance and competitiveness. These devices are the key to manufacturing micro devices at the micro and nano levels. Micro devices are the foundation of modern digital industry and are constantly changing the production and lifestyle of human beings. ABB has provided technical products such as Tmax XT molded case circuit breaker, AF contactor and su200m miniature circuit breaker to China micro Corporation to ensure the safe, continuous and stable operation of the motor control center of precision equipment.

The technical barrier of the whole semiconductor industry chain is high, and the semiconductor equipment must give consideration to performance and stability in order to meet the strict yield requirements of wafer manufacturing. The more advanced the chip, the smaller the process required, and the higher the "resolution" of the micro pattern. Take the etching equipment of China micro Corporation as an example. As a "scalpel" for nano level engraving, its process is to perform micro processing on the chip. The precision of chip processing is equivalent to one tenth of the diameter of hair, which is extremely demanding. ABB's electrical products meet the double standards for stability and high performance of semiconductor equipment.

Tmax XT molded case circuit breaker is of double insulation structure, which has strong resistance to mechanical vibration and electromagnetic effect, ensuring the safety of the equipment. The AF contactor has advantages such as wide voltage, low power consumption, on-off switch, etc. it can operate stably and continuously in the circuit with unstable voltage. It is a major improvement in motor control and circuit on-off, and can help micro and small companies reduce consumption by 80%. As the heat dissipation is reduced, the installation density in the control cabinet is increased, which realizes cost reduction and efficiency increase.

In the era of Internet of everything, the intelligent upgrading of mechanical equipment is imperative. ABB digital solutions can manage the health of intelligent components, predict equipment failures in advance, reduce economic losses caused by unexpected power outages, and change passive preventive maintenance into active predictive maintenance. ABB cooperates with China micro Corporation and plans to apply ABB digital module in semiconductor equipment to monitor the operating temperature of the main circuit of the switch in real time, ensure the safe and stable operation of the equipment, and realize intelligent operation and maintenance.

Zhao Yongzhan, President of ABB Electric China, said that semiconductor equipment manufacturing is the core of information technology and requires more precise and advanced technology integration. The successful application of ABB electrical products in medium and micro semiconductor equipment has improved the stability and reliability of precision equipment and confirmed ABB's profound technical expertise and quality assurance in the electrical field. Micro China is one of the benchmark enterprises in China's high-end equipment manufacturing industry. Abb is willing to further explore the high-quality development of mechanical equipment with industry leaders.